Analysis of active damping of a silicon microphone using a linear controller

This paper presents a model of a silicon microphone with active electronic damping. The microphone has low passive damping to minimize thermal noise, and employs active damping from electrostatic actuation to improve its dynamic performance. To apply the linear robust control approach, the nonlinear dynamic system is modeled as a linear system with bounded parameters, and a controller is designed using the H_infin method which successfully drives the electrostatic actuator to generate the desired active damping. The effectiveness of the controller has been verified through simulation in both frequency and time domains.