DocumentCode
2390743
Title
Integrated 3D sound intensity sensor with four-wire particle velocity sensors
Author
Yntema, D.R. ; Van Honschoten, L.W. ; Wiegerink, RJ
Author_Institution
Transducers Sci. & Technol. group, Univ. of Twente, Enschede
fYear
2008
fDate
9-11 April 2008
Firstpage
168
Lastpage
170
Abstract
A new symmetrical four-wire sensor configuration has resulted in a fully integrated sound intensity sensor with significant lower noise floor and smaller size than its predecessors. An integrated sound pressure sensor was further miniaturized by using a folded ldquoback chamberpsila at both sides of the chip.
Keywords
acoustic devices; acoustic intensity measurement; nonelectric sensing devices; back chamber; four-wire particle velocity sensor; integrated 3D sound intensity sensor; Acoustic measurements; Acoustic noise; Acoustic sensors; Particle measurements; Pressure measurement; Sensor phenomena and characterization; Temperature sensors; Thermal sensors; Velocity measurement; Wires;
fLanguage
English
Publisher
ieee
Conference_Titel
Design, Test, Integration and Packaging of MEMS/MOEMS, 2008. MEMS/MOEMS 2008. Symposium on
Conference_Location
Nice
Print_ISBN
978-2-35500-006-5
Type
conf
DOI
10.1109/DTIP.2008.4752976
Filename
4752976
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