DocumentCode
2390767
Title
MEMS enabled sensing microsystems: bridging the gap from devices to systems
Author
Gaura, Elena ; Newman, Robert
fYear
2004
fDate
Aug. 26-31, 2004
Firstpage
933
Lastpage
938
Keywords
Control engineering computing; Control systems; Design engineering; Intelligent sensors; Microelectromechanical devices; Micromachining; Micromechanical devices; Paper technology; Sensor systems; Sensor systems and applications;
fLanguage
English
Publisher
ieee
Conference_Titel
Intelligent Mechatronics and Automation, 2004. Proceedings. 2004 International Conference on
Print_ISBN
0-7803-8748-1
Type
conf
DOI
10.1109/ICIMA.2004.1384334
Filename
1384334
Link To Document