Validation of compact models of microcantilever actuators for RF-MEMS application

Author

Brusa, Eugenio ; Gaspera, Antonio Della ; Munteanu, Mircea Gh

Author_Institution

Dept. Electr., Manage. Mech. Eng., Univ. degli Studi di Udine, Udine

fYear

2008

fDate

9-11 April 2008

Firstpage

218

Lastpage

221

Abstract

Microcantilever specimens for in-plane and out-of-plane bending tests are here analyzed. Experimental validation of 2D and 3D numerical models is performed. Main features of in-plane and out-of-plane layouts are then discussed. Effectiveness of plane models to predict pull-in in presence of geometric nonlinearity due to a large tip displacement and initial curvature of microbeam is investigated. The paper is aimed to discuss the capability of 2D models to be used as compact tools to substitute some model order reduction techniques, which appear unsuitable in presence of both electromechanical and geometric nonlinearities.

Keywords

bending; cantilevers; microactuators; 2D numerical model; 3D numerical model; RF-MEMS application; compact models; electromechanical nonlinearities; geometric nonlinearities; geometric nonlinearity; in-plane bending test; in-plane layouts; microbeam curvature; microcantilever actuators; out-of-plane bending test; out-of-plane layout; tip displacement; Actuators; Geometry; Mathematical model; Numerical models; Predictive models; Radiofrequency microelectromechanical systems; Semiconductor process modeling; Solid modeling; Testing; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Design, Test, Integration and Packaging of MEMS/MOEMS, 2008. MEMS/MOEMS 2008. Symposium on

Conference_Location

Nice

Print_ISBN

978-2-35500-006-5

Type

conf

DOI

10.1109/DTIP.2008.4752987

Filename

4752987