Geometrical variation analysis of an electrothermally driven polysilicon micoactuator

The analytical models that predict thermal and mechanical responses of microactuator have been developed. These models are based on electro thermal and thermo mechanical analysis of the microbeam. Also, Finite Element Analysis (FEA) is used to evaluate microactuator tip deflection. Analytical and Finite Element results are compared with experimental results in literature and show good agreement in low input voltages. A dimensional variation of beam lengths, beam lengths ratios and gap are introduced in analytical and FEA models to explore microactuator performance.