DocumentCode
2391440
Title
Characterization and modeling of an electro-thermal MEMS atructure
Author
Szabó, P.G. ; Székely, V.
Author_Institution
Dept. of Electron Devices, Budapest Univ. of Technol. & Econ. (BME), Budapest
fYear
2008
fDate
9-11 April 2008
Firstpage
350
Lastpage
354
Abstract
Thermal functional circuits are an interesting and perspectivic group of the MEMS elements. A practical realization is called quadratic transfer characteristic (QTC) element which driving principle is the Seebeck-effect. In this paper we present the analyses of a QTC element from different perspectives. To check the real behaviour of the device, we measured a few, secondary properties of the structure which correspond to special behaviour because these properties can not be easily derived from the main characteristics.
Keywords
Seebeck effect; micromechanical devices; thermoelectric devices; QTC element; Seebeck effect; electro-thermal MEMS structure modeling; quadratic transfer characteristic; thermal functional circuits; CMOS technology; Capacitance; Circuit testing; Electron devices; Micromechanical devices; Power generation economics; Resistance heating; Resistors; SPICE; Scanning electron microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Design, Test, Integration and Packaging of MEMS/MOEMS, 2008. MEMS/MOEMS 2008. Symposium on
Conference_Location
Nice
Print_ISBN
978-2-35500-006-5
Type
conf
DOI
10.1109/DTIP.2008.4753016
Filename
4753016
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