Title :
UV direct-writing of metals on polyimide
Author :
Ng, Jack Hoyd-Gigg ; Desmulliez, Marc P Y ; McCarthy, Aongus ; Suyal, Himanshu ; Prior, KevinA ; Hand, Duncan P.
Author_Institution :
Microsyst. Eng. Centre (MISEC), Heriot-Watt Univ., Edinburgh
Abstract :
Conductive micro-patterned copper tracks were fabricated by UV direct-writing of a nanoparticle silver seed layer followed by selective electroless copper deposition. Silver ions were first incorporated into a hydrolyzed polyimide surface layer by wet chemical treatment. A photoreactive polymer coating, methoxy poly(ethylene glycol) (MPEG) was coated on top of the substrate prior to UV irradiation. Electrons released through the interaction between the MPEG molecules and UV photons allowed the reduction of the silver ions across the MPEG/doped polyimide interface. The resultant silver seed layer has a cluster morphology which is suitable for the initiation of electroless plating. Initial results showed that the deposited copper tracks were in good agreement with the track width on the photomask and laser direct-writing can also fabricate smaller line width metal tracks with good accuracy. The facile fabrication presented here can be carried out in air, at atmospheric pressure, and on contoured surfaces.
Keywords :
copper; electroplating; polymer films; ultraviolet lithography; ultraviolet radiation effects; Ag; UV direct-writing; UV irradiation; cluster morphology; conductive micropatterned copper tracks; electroless copper deposition; electroless plating; hydrolyzed polyimide surface layer; laser direct-writing; metal tracks; methoxy poly(ethylene glycol); nanoparticle silver seed layer; photomask; photoreactive polymer coating; silver ions; wet chemical treatment; Chemicals; Coatings; Copper; Costs; Polyimides; Polymer films; Silver; Surface morphology; Surface treatment; X-ray lasers;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS, 2008. MEMS/MOEMS 2008. Symposium on
Conference_Location :
Nice
Print_ISBN :
978-2-35500-006-5
DOI :
10.1109/DTIP.2008.4753018