Hysteresis in RF MEMS shunt switch: Simulation and measurements

Author

Braghetto, P. ; Kretly, L.C.

Author_Institution

State Univ. of Campinas, Sao Paulo

fYear

2007

fDate

Oct. 29 2007-Nov. 1 2007

Firstpage

136

Lastpage

140

Abstract

In this paper we present an intrinsic mechanical characteristic of MEMS switches, the hysteresis in ON-OFF cycle of operation. The hysteresis in voltage arises from the transition between stable and unstable equilibrium solutions of the force-balancing equations, due to different stresses suffered by the bridge of the switch during changing the two states. Hysteresis will be modeled making use of electromechanical-structural coupling simulation softwares through finite elements or boundary conditions methods, in order to calculate full beam deflections and release behavior. Finally, RF MEMS switch was constructed and its hysteresis voltages measured and compared.

Keywords

finite element analysis; hysteresis; microswitches; ON-OFF cycle; RF MEMS shunt switch; boundary conditions methods; electromechanical-structural coupling simulation softwares; finite elements methods; force-balancing equations; hysteresis voltages; unstable equilibrium; Bridge circuits; Differential equations; Finite element methods; Hysteresis; Microswitches; Optical coupling; Radiofrequency microelectromechanical systems; Stress; Switches; Voltage; Micro-electro-mechanical systems; RF Switch; finite elements; hysteresis; pull-in; release;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave and Optoelectronics Conference, 2007. IMOC 2007. SBMO/IEEE MTT-S International

Conference_Location

Brazil

Print_ISBN

978-1-4244-0661-6

Electronic_ISBN

978-1-4244-0661-6

Type

conf

DOI

10.1109/IMOC.2007.4404230

Filename

4404230