DocumentCode
2392817
Title
Pyroelectric, ferroelectric and optic properties of PbTiO3 thin films by thermal decomposition of metallo-organic compounds
Author
Liangying, Zhang ; Xi Yao ; Zhongyang, Cheng ; Wei, Ren ; Xiaoqing, Wu
Author_Institution
Electron. Mater. Res. Lab., Xi´´an Jiaotong Univ., China
fYear
1991
fDate
25-27 Sep 1991
Firstpage
530
Lastpage
535
Abstract
PbTiO3 thin films were prepared by thermal decomposition of metallo-organic compounds. Pyroelectric and ferroelectric properties of the films prepared from various processing conditions are reported. The dielectric constants of the films on Si wafers and glass ceramic slides are 115 and 83, respectively, and the tangent of loss angle is less than 0.05 at 1 kHz. Spontaneous polarization and remanent polarization of the films on Si wafers are 10.59 uc/cm2 and 8.96 uc/cm2. The pyroelectric coefficient increases rapidly with increasing annealing temperature and is 1.62×10-8 C/cm2 K (annealed at 600°C). The birefringence of PbTiO3 films was measured at 632.8 nm wavelength by the prism-coupling method
Keywords
dielectric polarisation; electrets; ferroelectric materials; ferroelectric thin films; lead compounds; permittivity; pyroelectricity; 632.8 nm; PbTiO3 thin films; annealing temperature; birefringence; dielectric constants; electret; ferroelectric; optic properties; polarization; pyroelectric coefficient; remanent polarization; thermal decomposition; Annealing; Dielectric constant; Dielectric thin films; Ferroelectric films; Ferroelectric materials; Optical films; Polarization; Pyroelectricity; Semiconductor films; Thermal decomposition;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrets, 1991. (ISE 7) Proceedings., 7th International Symposium on (Cat. No.91CH3029-6)
Conference_Location
Berlin
Print_ISBN
0-7803-0112-9
Type
conf
DOI
10.1109/ISE.1991.167268
Filename
167268
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