Title :
MEMS dilemma: how to move from the "technology push" to the "market pull" category?
Author :
Vigna, Benedetto
Abstract :
In this paper, we examine the background of these problems with some practical examples and some potential solutions to help MEMS to leave the "technology push" category for the "market pull" category.
Keywords :
micromechanical devices; MEMS dilemma; technology push-market pull category; Accelerometers; Manufacturing; Microelectromechanical devices; Microelectronics; Micromechanical devices; Packaging; Production; Silicon; Standardization; Testing;
Conference_Titel :
VLSI Technology, Systems, and Applications, 2003 International Symposium on
Print_ISBN :
0-7803-7765-6
DOI :
10.1109/VTSA.2003.1252577