• DocumentCode
    2397680
  • Title

    Design of experiments (DOE) in the semiconductor industry

  • Author

    Joshi, Madhukar

  • Author_Institution
    Digital Equipment Corp., Hudson, MA, USA
  • fYear
    1991
  • fDate
    21-23 Oct 1991
  • Firstpage
    17
  • Lastpage
    24
  • Abstract
    The author describes the educational component of Digital Equipment Corporation´s DOE program. It provides the necessary DOE education via 3 1/2-hour modules. The first module outlines the major steps in any planned experiment. Each subsequent module is driven by workshops with four simultaneous case studies. The `how to´ set of instructions converts each technique into a process. Participants discover the underlying concepts and this helps reinforce their on-the-job implementation. Reports of findings help improve participants´ presentation skills and foster dialogue. Modules are supplemented by computer labs lasting two hours each. Each experimenter and his her manager is given a list of questions to ask before and during experimentation to help avoid unpleasant surprises. Each experiment is summarized using a case study report form to foster communication and generate new ideas for further experiments. As a result, 95 participants have graduated in the last 15 months of the program, and a number of nonstatisticians have implemented many very good experiments
  • Keywords
    education; electronics industry; DEC; Digital Equipment Corporation; case study report form; computer labs; educational component; on-the-job implementation; semiconductor industry; workshops; Analysis of variance; Charge coupled devices; Educational programs; Electronics industry; Higher order statistics; Manufacturing processes; Response surface methodology; Semiconductor device manufacture; Total quality management; US Department of Energy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Manufacturing Conference and Workshop, 1991. ASMC 91 Proceedings. IEEE/SEMI 1991
  • Conference_Location
    Boston, MA
  • Print_ISBN
    0-7803-0152-8
  • Type

    conf

  • DOI
    10.1109/ASMC.1991.167375
  • Filename
    167375