Title :
Design of experiments (DOE) in the semiconductor industry
Author_Institution :
Digital Equipment Corp., Hudson, MA, USA
Abstract :
The author describes the educational component of Digital Equipment Corporation´s DOE program. It provides the necessary DOE education via 3 1/2-hour modules. The first module outlines the major steps in any planned experiment. Each subsequent module is driven by workshops with four simultaneous case studies. The `how to´ set of instructions converts each technique into a process. Participants discover the underlying concepts and this helps reinforce their on-the-job implementation. Reports of findings help improve participants´ presentation skills and foster dialogue. Modules are supplemented by computer labs lasting two hours each. Each experimenter and his her manager is given a list of questions to ask before and during experimentation to help avoid unpleasant surprises. Each experiment is summarized using a case study report form to foster communication and generate new ideas for further experiments. As a result, 95 participants have graduated in the last 15 months of the program, and a number of nonstatisticians have implemented many very good experiments
Keywords :
education; electronics industry; DEC; Digital Equipment Corporation; case study report form; computer labs; educational component; on-the-job implementation; semiconductor industry; workshops; Analysis of variance; Charge coupled devices; Educational programs; Electronics industry; Higher order statistics; Manufacturing processes; Response surface methodology; Semiconductor device manufacture; Total quality management; US Department of Energy;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1991. ASMC 91 Proceedings. IEEE/SEMI 1991
Conference_Location :
Boston, MA
Print_ISBN :
0-7803-0152-8
DOI :
10.1109/ASMC.1991.167375