DocumentCode
2398992
Title
Planarized MIM active matrix for LCD addressing
Author
Smirnov, Alexander ; Usenok, A. ; Vorobjeva, A. ; Vysotsky, V.
Author_Institution
Dept. of Microelectron., Minsk Radioeng. Inst., Byelorussia
fYear
1991
fDate
15-17 Oct. 1991
Firstpage
101
Lastpage
102
Abstract
A novel type of planarized MIM active matrix for LCD (liquid crystal display) addressing has been developed. The planarization has been achieved due to formation of self-aligned ´horizontal´ Ta-Ta/sub 2/O/sub 5/-Al diodes, incorporated into a porous Al/sub 2/O/sub 3/ film. High-quality pictures on color LCD with a diagonal of 6 in have been observed.<>
Keywords
liquid crystal displays; metal-insulator-metal devices; semiconductor diodes; semiconductor technology; tantalum; tantalum compounds; 6 inch; LCD addressing; Ta-Ta/sub 2/O/sub 5/-Al diodes; colour LCD; liquid crystal display; nematic liquid crystals; planarized MIM active matrix; porous Al/sub 2/O/sub 3/ film; self aligned horizontal film; Active matrix addressing; Active matrix organic light emitting diodes; Active matrix technology; Annealing; Capacitance; Counting circuits; Leg; Planarization; Temperature; Thickness control;
fLanguage
English
Publisher
ieee
Conference_Titel
Display Research Conference, 1991., Conference Record of the 1991 International
Conference_Location
San Diego, CA, USA
Print_ISBN
0-7803-0213-3
Type
conf
DOI
10.1109/DISPL.1991.167442
Filename
167442
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