Title :
Monolithic silicon waveguides in bulk silicon
Author :
Chang, Chia-Ming ; Solgaard, Olav
Abstract :
Low loss silicon waveguides fabricated by etching of standard silicon wafers are demonstrated. The fabrication method does not require SOI substrates and therefore simplifies integration of electronics and photonics.
Keywords :
elemental semiconductors; etching; integrated optics; optical fabrication; optical losses; optical waveguides; silicon; Si; bulk silicon; electronics; etching; integrated optics; low loss monolithic silicon waveguides; photonics; standard silicon wafers; Optical losses; Optical waveguides; Oxidation; Photonics; Propagation losses; Silicon; Substrates;
Conference_Titel :
Optical Interconnects Conference, 2012 IEEE
Conference_Location :
Santa Fe, NM
Print_ISBN :
978-1-4577-1620-1
DOI :
10.1109/OIC.2012.6224463
