Integration of photonic sensor array with GeSi photo-detectors for multiplexing detection

Author

Chen, X.T. ; Wang, B. ; Chandrappan, J. ; Tian, W.Y. ; Ang, K.W. ; Reboud, J. ; Je, M.K. ; Kumarasamy, R.M. ; Lo, Patrick

Author_Institution

Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore

fYear

2010

fDate

14-16 Dec. 2010

Firstpage

1

Lastpage

2

Abstract

A approach of using high performance Ge photo-detectors (PD) integrated with Si waveguide based microresonators for multiplexing detection has been proposed. Simultaneous measurement of the resonance curves of sensor array using this approach has been demonstrated. The resonance peaks of integrated sensor array show good correlation (R2=0.9979) with that of normal resonator, proving the feasibility of this approach for multiplexed bio-sensing application.

Keywords

biosensors; germanium; integrated optics; micro-optomechanical devices; micromechanical resonators; microsensors; multiplexing; optical sensors; optical waveguides; photodetectors; sensor arrays; silicon; Ge-Si; microresonators; multiplexed bio-sensing; multiplexing detection; optical waveguides; photodetector integration; photonic sensor array; Arrays; Multiplexing; Optical fiber sensors; Optical ring resonators; Optical waveguides; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Photonics Global Conference (PGC), 2010

Conference_Location

Singapore

Print_ISBN

978-1-4244-9882-6

Type

conf

DOI

10.1109/PGC.2010.5706076

Filename

5706076