Title :
High quality factor micromachined toroid and solenoid inductors
Author :
Zine-El-Abidine, Imed ; Okoniewski, Michal
Author_Institution :
Univ. of Calgary, Calgary
Abstract :
High quality toroid and solenoid inductors, exhibiting quality factors as high as 87 at 14.5 GHz and 35 at 6.4 GHz are presented in this paper. The inductors are fabricated using only two plating steps which reduces the complexity of the fabrication. The process lowers the number of ohmic contacts between the electroplated layers improving the performance of the device. The fabrication process is low-temperature and fully compatible with CMOS technology which makes it suitable for post-IC processing.
Keywords :
inductors; micromachining; microwave devices; CMOS technology; electroplated layer; frequency 14.5 GHz; frequency 6.4 GHz; high quality factor micromachined toroid inductor; low-temperature fabrication process; post-IC processing; solenoid inductor; two plating steps; CMOS technology; Copper; Dielectric substrates; Etching; Fabrication; Inductors; Q factor; Resists; Silicon; Solenoids; Inductors; micromachining; microwave circuits;
Conference_Titel :
Microwave Conference, 2007. European
Conference_Location :
Munich
Print_ISBN :
978-2-87487-001-9
DOI :
10.1109/EUMC.2007.4405402
