Title :
‘Atomistic’ simulation of RTS amplitudes due to single and multiple charged defect states and their interactions
Author :
Bukhori, Muhammad Faiz ; Grasser, Tibor ; Kaczer, Ben ; Reisinger, Hans ; Asenov, Asen
Author_Institution :
Device Modelling Group, Univ. of Glasgow, Glasgow, UK
Abstract :
We investigate the experimentally observed gate voltage dependence of the step heights induced by charged defects. Taking into account the intrinsic variability source of random dopants, our simulations confirm that the location of the defect with respect to the critical current percolation path affects the response of the trap to the applied gate bias. However, the details of the bias dependence of this response depend on the exact location relative to the percolation path. Furthermore, the impact of the various charge states of the defect on the step heights is investigated.
Keywords :
critical currents; defect states; hole traps; percolation; semiconductor device models; semiconductor doping; RTS amplitudes; atomistic simulation; bias dependence; charge states; critical current percolation path; gate bias; gate voltage dependence; intrinsic variability source; multiple charged defect states; random dopants; single charged defect states; step heights; Fluctuations; Logic gates; MOSFETs; Semiconductor process modeling; Threshold voltage;
Conference_Titel :
Integrated Reliability Workshop Final Report (IRW), 2010 IEEE International
Conference_Location :
Stanford Sierra, CA
Print_ISBN :
978-1-4244-8521-5
DOI :
10.1109/IIRW.2010.5706490