Ion Beam Etching of Reflective Array Filters

Author

Smith, Henry I. ; Williamson, R.C. ; Brogan, W.T.

fYear

1972

fDate

1972

Firstpage

198

Lastpage

201

Keywords

Electrodes; Electrons; Filters; Gratings; Ion beams; Laboratories; Optical reflection; Resists; Sputter etching; Sputtering;

fLanguage

English

Publisher

ieee

Conference_Titel

1972 Ultrasonics Symposium

Type

DOI

10.1109/ULTSYM.1972.196062

Filename

1533002

Link To Document