Title :
Characteristics of the PPy Material as pH Sensitive Membrane
Author :
Wang, Zumin ; Ren, Zhengxin ; Han, Jinghong ; Bian, Chao ; Xia, Shanhong
Author_Institution :
State Key Lab. of Transducer Technol., CAS, Beijing
Abstract :
A monolithic pH sensor system has been studied and developed, based on standard CMOS technology. The micro system includes an on-chip integration of differential ISFET/REFET sensing devices, metal constructed pseudo reference electrode (PRE) and their relative signal processing circuits. We mainly present the development of PPy(polypyrrole) membrane by the way of electrochemical polymerization, which was grown on the gate of ISFET, as pH sensitive material. With a series of experiments, a high sensitivity of 56mV/pH was achieved within the pH range from 1 to 12. In the end, we discussed the influence of reagents and polymerization parameters on the pH sensor system.
Keywords :
chemical sensors; pH measurement; polymerisation; CMOS technology; electrochemical polymerization; ion sensitive field effect transistor; monolithic pH sensor system; pH sensitive membrane; polypyrrole; pseudo reference electrode; signal processing circuits; Biological materials; Biomembranes; CMOS process; CMOS technology; Circuits; Content addressable storage; Electrodes; FETs; Polymers; Sensor systems; Polypyrrole; ion sensitive field effect transistor; pH sensitive membrane;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on
Conference_Location :
Bangkok
Print_ISBN :
1-4244-0610-2
DOI :
10.1109/NEMS.2007.352039
