Fabrication of a Complicated Heat Transfer Microchannel System for CPU Cooling Study

Fabrication of a temperature sensor array and a heater in a complicated heat transfer microchannel system, on a glass substrate, is presented. In addition to the glass substrate, low thermal conductivity materials such as SU-8, PMMA plate are selected to form the micro channel wall to provide good thermal insulation. Both the titanium and the platinum are deposited sequentially on a glass plate and made into heater and sensors, respectively. Lift-off method is used to obtain the desired pattern for heater and sensors. The fabrication process is much simpler than those reported in literature. Design consideration and fabrication techniques involved in this processes is discussed. Finally, validation of the heaters and sensors fabricated and a measurement of the heat transfer coefficient distributions inside the micro channel is presented.