DocumentCode
2420166
Title
Fabrication of Microwave-Frequency Surface-Acoustic-Wave Transducers Using a Novel Electron-Beam Projection System
Author
Lee, R.E. ; Westerberg, E.R. ; Bahr, A.J.
fYear
1973
fDate
1973
Firstpage
517
Lastpage
521
Keywords
Acoustic transducers; Apertures; Charge carrier processes; Electron beams; Fabrication; Lenses; Microwave frequencies; Optical surface waves; Resists; Scanning electron microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
1973 Ultrasonics Symposium
Type
conf
DOI
10.1109/ULTSYM.1973.196255
Filename
1533195
Link To Document