Title :
Variation of Surface - Acoustic - Wave Velocity Produced by Ion Implantation
Author :
Hartemann, P. ; Morizot, M.
Keywords :
Amorphous materials; Crystallization; Helium; Ion implantation; Lithium niobate; Optical surface waves; Substrates; Surface acoustic wave devices; Surface acoustic waves; Velocity measurement;
Conference_Titel :
1974 Ultrasonics Symposium
DOI :
10.1109/ULTSYM.1974.196342