DocumentCode :
2421722
Title :
Variation of Surface - Acoustic - Wave Velocity Produced by Ion Implantation
Author :
Hartemann, P. ; Morizot, M.
fYear :
1974
fDate :
1974
Firstpage :
307
Lastpage :
310
Keywords :
Amorphous materials; Crystallization; Helium; Ion implantation; Lithium niobate; Optical surface waves; Substrates; Surface acoustic wave devices; Surface acoustic waves; Velocity measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1974 Ultrasonics Symposium
Type :
conf
DOI :
10.1109/ULTSYM.1974.196342
Filename :
1533282
Link To Document :
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