DocumentCode
242209
Title
Bipolar resistive switching behaviors in an Al/DLC/W structure
Author
Jianlong Xu ; Dan Xie ; Pinggang Peng ; Xiaowen Zhang ; Tian-Ling Ren
Author_Institution
Tsinghua Nat. Lab. for Inf. Sci. & Technol. (TNList), Tsinghua Univ., Beijing, China
fYear
2014
fDate
28-31 Oct. 2014
Firstpage
1
Lastpage
3
Abstract
We report the bipolar resistive switching behaviors of the Al/DLC/W structure. The fabricated device shows good memory performances with high ON/OFF ratio, long data retention time, good endurance and low operation voltage. The formed gas bubbles at the Al surface after repeated SET and RESET operations are found to arise from the oxygen vacancies by the formation of Al2O3 layer at the DLC/Al interface, which is also responsible for the resistive switching behaviors of the device.
Keywords
aluminium compounds; bipolar memory circuits; diamond-like carbon; oxygen; resistive RAM; tungsten; Al-C-W; Al2O3; DLC; RRAM; bipolar resistive switching behaviors; data retention time; diamond-like carbon; gas bubbles; oxygen vacancies; resistive switching random access memory; Abstracts; Films; RNA; Switches;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State and Integrated Circuit Technology (ICSICT), 2014 12th IEEE International Conference on
Conference_Location
Guilin
Print_ISBN
978-1-4799-3296-2
Type
conf
DOI
10.1109/ICSICT.2014.7021531
Filename
7021531
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