Design and simulation of a 2-axis low g acceleration switch with multi-folded beams

Author

Luxing Lin ; Qiancheng Zhao ; Zhenchuan Yang ; Dacheng Zhang ; Guizhen Yan

Author_Institution

Nat. Key Lab. of Sci. & Technol. on Micro/Nano Fabrication, Peking Univ., Beijing, China

fYear

2014

fDate

28-31 Oct. 2014

Firstpage

1

Lastpage

3

Abstract

A 2-axis low G acceleration threshold switch with multi-folded beams and buffering springs is presented in this paper. The multi-folded beams at four corners which anchored on the substrate permit the proof-mass move in both X and Y axis. The buffering springs contact the proof-mass and one electrode aiming at extending the contact time when the switch is latched while protecting the switch against severe shock damage from intensive impact of the switch. The threshold acceleration of the switch is designed as 60G and will be fabricated by a two-mask silicon-on-glass process.

Keywords

electric shocks; electrical contacts; electrodes; electronic engineering computing; flip-flops; masks; springs (mechanical); switches; 2-axis low G acceleration threshold switch; X axis; Y axis; buffering spring contact; electrode; latching; multifolded beam; proof-mass move; shock damage; two-mask silicon-on-glass process; Abstracts; Acceleration; Fabrication; Frequency control; Silicon; Springs; Switches;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated Circuit Technology (ICSICT), 2014 12th IEEE International Conference on

Conference_Location

Guilin

Print_ISBN

978-1-4799-3296-2

Type

conf

DOI

10.1109/ICSICT.2014.7021682

Filename

7021682