Title :
Framework of MEMS high accelerated stress test
Author :
Wang, Zhen ; Xu, Lixin ; Wang, Zhao ; Zhao, Heming ; Song, Rongchang ; Lou, Wenzhong
Author_Institution :
Nat. Key Lab. of Mechatron. Eng. & Control, Beijing Inst. of Technol., Beijing, China
Abstract :
Given the reliability principles and failure mechanism of MEMS, this paper discussed the accelerated test from three aspects as follows: the connotation of the test including concept and meaning; the scope of application concerned with product levels for applicants in types of stress; test process includes the test objective determination, test stressing selection, the test profile designing, the implementation scheme determining, analysis and improvement measures.
Keywords :
failure analysis; micromechanical devices; reliability; stress analysis; MEMS; failure mechanism; reliability principle; test objective determination; test profile designing; test stressing selection; HAST; MEMS; reliability;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on
Conference_Location :
Xiamen
Print_ISBN :
978-1-4244-6543-9
DOI :
10.1109/NEMS.2010.5592211
