• DocumentCode
    243074
  • Title

    Wafer-Fusion-Enabled Platforms for Mid-Infrared Integrated Silicon Photonics

  • Author

    Chiles, Jeff ; Khan, Sharifullah ; Fathpour, Sasan

  • Author_Institution
    Coll. of Opt. & Photonics, Univ. of Central Florida, Orlando, FL, USA
  • fYear
    2014
  • fDate
    14-16 July 2014
  • Firstpage
    47
  • Lastpage
    48
  • Abstract
    The prospects of three newly developed platforms for broadband mid-infrared integrated silicon photonics (namely, silicon-on-nitride, the all-silicon optical platform and silicon-on-lithium niobate) enabled by the process of wafer fusion are investigated.
  • Keywords
    elemental semiconductors; infrared spectra; integrated optics; lithium compounds; niobium compounds; nitrogen; optical materials; optical waveguides; silicon; wafer bonding; Si-LiNbO3; Si-N; all-silicon optical platform; broadband midinfrared integrated silicon photonics; silicon-on-lithium niobate; silicon-on-nitride; wafer-fusion-enabled platforms; Biomedical optical imaging; Integrated optics; Optical device fabrication; Optical ring resonators; Optical waveguides; Photonics; Silicon; integrated optics; integrated optics materials; optoelectronics; waveguides;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photonics Society Summer Topical Meeting Series, 2014 IEEE
  • Conference_Location
    Montreal, QC
  • Print_ISBN
    978-1-4799-2766-1
  • Type

    conf

  • DOI
    10.1109/SUM.2014.35
  • Filename
    6902980
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=243074