A digital prototype miniature silicon microgyroscope

To improve the performance of silicon micro-gyroscope (SMG), a digital measurement and control scheme of SMG with symmetrical and decoupled structure is presented. The system was constructed with a high-performance FPGA hardware core and several precision peripherals such as analog and digital hybrid conditioning circuits. Some key modules and algorithm realization including the closed-loop drive circuit based on automatic gain control (AGC) loop, software phase lock loop(SPLL) and the sense demodulation module based on least mean square demodulation (LMSD) are intensively addressed. The measurement results have fully demonstrated the stability and flexibility of the system.