Fabrication and performance analysis of an amorphous silicon-based thermal IR detector

Author

Kang, Hyun Oh ; Zhiguo, Zhao ; Jeon, Seong Ki ; Jung, Ho ; Kim, Hak-Rin ; Kwon, Dae-Hyuk ; Lee, Jung-Hee ; Kang, Shin-Won ; Kong, Seong Ho

Author_Institution

Sch. of Electr. Eng. & Comput. Sci., Kyungpook Nat. Univ., Daegu, South Korea

fYear

2010

fDate

20-23 Jan. 2010

Firstpage

696

Lastpage

699

Abstract

In this paper, an amorphous Si-based thermal infrared detector with an improved responsivity and optimized structure is reported. Using Finite Element Analysis (FEA) simulation, the length and structure of the leg to extend sensing area are designed to minimize the heat loss of uncooled bolometric amorphous Si-based thermal infrared detector. The thermal infrared detector is fabricated using microelectro mechanical system (MEMS) technology and the operating performances of thermal infrared detector are analyzed and compared with conventional thermal infrared detectors.

Keywords

amorphous semiconductors; finite element analysis; infrared detectors; microfabrication; silicon; MEMS technology; amorphous silicon-based thermal IR detector; finite element analysis; thermal infrared detector; amorphous silicon; s-bolometer; thermal image sensor; uncooled infrared detector;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on

Conference_Location

Xiamen

Print_ISBN

978-1-4244-6543-9

Type

conf

DOI

10.1109/NEMS.2010.5592504

Filename

5592504