Title :
Study of the parameters of micromechanical devices with electromagnetic control
Author :
Korneyev, Vladimir S.
Author_Institution :
Siberian State Acad. of Geodesy, Novosibirsk, Russia
Abstract :
The being developed micromechanical device is designed for control of the optical rays position in space. The device is made in the format of the silicon chip with sizes of 1 times 2 cm and consists of 100 micro-mirrors. Each micromirror has an actuator (an engine) in the form of a magnetic dipole. The device is controlled by an external magnetic field induces a magnetic moment in the dipoles. The device works as a diffraction grating with a variable angle of light, redirecting the reflected light flux into one of the diffraction orders.
Keywords :
diffraction gratings; elemental semiconductors; magnetic moments; micro-optomechanical devices; microactuators; micromirrors; optical control; position control; silicon; MOEMS; Si; actuator; diffraction grating; diffraction orders; electromagnetic control; external magnetic field; magnetic dipole; magnetic moment; micromechanical devices; micromirrors; optical ray position control; reflected light flux; silicon chip; size 1 cm; size 2 cm; Actuators; Diffraction; Electromagnetic devices; Engines; Micromechanical devices; Micromirrors; Optical control; Optical design; Optical devices; Silicon; Micromechanical device; actuator; magnetic dipole; micromirrors; the diffraction grating; the diffraction pattern; the main peak;
Conference_Titel :
Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies, 2009. INTERNANO 2009. International School and Seminar on
Conference_Location :
Novosibirsk
Print_ISBN :
978-1-4244-5534-8
DOI :
10.1109/INTERNANO.2009.5335621
