Atmospherich pressure plasma jets: Concepts and realization of miniaturized jets and jet arrays

Author

Theirich, D. ; Kedzierski, J. ; Engemann, J.

Author_Institution

Forschungszentrum for Mikrostrukturtechnik, Univ. of Wuppertal, Freudenberg

fYear

2008

fDate

15-19 June 2008

Firstpage

1

Lastpage

1

Abstract

Plasma jets presented here are based on cylindrical dielectric barrier discharges. Multi jet arrays formed from bundles of 6 and 10 individual single jets are realized in very compact housings. Surface treatments of polymers to increase their adhesion are discussed and compared to results achieved by other types of plasmas. A second type of ap plasma jet sources is based on an integrated ceramic technology. This technology can realize micro jets with diameters of a few hundred micrometers and a length of about 1 cm. All micro jets of an array can be manufactured in parallel with only a few fabrication steps. In the future also addressable micro jet arrays are conceivable which may be used for direct patterning of surfaces.

Keywords

plasma jets; plasma materials processing; plasma sources; polymers; surface treatment; ap plasma jet sources; atmospheric pressure plasma jets; integrated ceramic technology; jet arrays; miniaturized jets; polymer surface treatments; Adhesives; Atmospheric-pressure plasmas; Ceramics; Dielectrics; Fault location; Plasma materials processing; Plasma sources; Polymers; Surface discharges; Surface treatment;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science, 2008. ICOPS 2008. IEEE 35th International Conference on

Conference_Location

Karlsruhe

ISSN

0730-9244

Print_ISBN

978-1-4244-1929-6

Electronic_ISBN

0730-9244

Type

conf

DOI

10.1109/PLASMA.2008.4590623

Filename

4590623