Title :
High-Speed Fabrication of High-Quality Sputtered ZnO Thin-Films for Bulk and Surface Wave Applications
Author :
Shiosaki, Tadashi
Keywords :
Fabrication; Magnetic devices; Optical films; Piezoelectric films; Sputtering; Substrates; Surface waves; Thin films; Transducers; Zinc oxide;
Conference_Titel :
1978 Ultrasonics Symposium
DOI :
10.1109/ULTSYM.1978.197013
