• DocumentCode
    2434572
  • Title

    High-Speed Fabrication of High-Quality Sputtered ZnO Thin-Films for Bulk and Surface Wave Applications

  • Author

    Shiosaki, Tadashi

  • fYear
    1978
  • fDate
    1978
  • Firstpage
    100
  • Lastpage
    110
  • Keywords
    Fabrication; Magnetic devices; Optical films; Piezoelectric films; Sputtering; Substrates; Surface waves; Thin films; Transducers; Zinc oxide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    1978 Ultrasonics Symposium
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1978.197013
  • Filename
    1533953
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2434572