Title :
Scarring Electron Microscopy of Resonating Surface Acoustic Wave Devices
Keywords :
Acoustic beams; Acoustic transducers; Acoustic waves; Electron beams; Electron microscopy; Frequency; Scanning electron microscopy; Surface acoustic wave devices; Surface acoustic waves; Surface charging;
Conference_Titel :
1978 Ultrasonics Symposium
DOI :
10.1109/ULTSYM.1978.197113