DocumentCode :
2436222
Title :
Scarring Electron Microscopy of Resonating Surface Acoustic Wave Devices
Author :
Heisinger, P.
fYear :
1978
fDate :
1978
Firstpage :
611
Lastpage :
616
Keywords :
Acoustic beams; Acoustic transducers; Acoustic waves; Electron beams; Electron microscopy; Frequency; Scanning electron microscopy; Surface acoustic wave devices; Surface acoustic waves; Surface charging;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1978 Ultrasonics Symposium
Type :
conf
DOI :
10.1109/ULTSYM.1978.197113
Filename :
1534053
Link To Document :
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