Title :
GaAs MMIC design using basic elements library
Author :
Krutov, A.V. ; Rebrov, A.S. ; Temnov, A.M.
Author_Institution :
´Istok´ Fed. State-Owned Unitary Res. & Production Enterprise, Moscow, Russia
Abstract :
In this report the issues related to the design of microwave monolithic and hybrid-monolithic integrated circuits using the library of basic elements are considered. The MMIC production technique is shown which provides for the generation of active and passive circuit elements with a electronic microscope dimensional processing at resolutions below 0.25/spl mu/m and with a 1/spl mu/m photolithographic processing. The structure of the library of basic elements is shown, which includes metal and mesa-resistors, metal-insulator-metal capacitors, inductors, air bridges, plated holes, and field effect transistors. The topological standards for the base elements are integrated into the production cycle. The design of a monolithic low noise amplifier and a hybrid-monolithic amplifier is shown.
Keywords :
III-V semiconductors; MIS capacitors; MMIC; amplifiers; electron microscopes; field effect transistors; gallium arsenide; hybrid integrated circuits; photolithography; GaAs; GaAs MMIC design; basic element library; electronic microscope dimensional processing; field effect transistor; hybrid-monolithic integrated circuit; mesa-resistor; metal resistor; metal-insulator-metal capacitor; microwave monolithic integrated circuit; monolithic low noise amplifier; photolithographic processing; topological standard; Electron microscopy; Gallium arsenide; Hybrid integrated circuits; Libraries; Low-noise amplifiers; MMICs; Microwave integrated circuits; Monolithic integrated circuits; Passive circuits; Production;
Conference_Titel :
Microwave and Telecommunication Technology, 2003. CriMiCo 2003. 13th International Crimean Conference
Conference_Location :
Sevastopol, Crimea, Ukraine
Print_ISBN :
966-7968-26-X
DOI :
10.1109/CRMICO.2003.158801
