Testchip for high temperature superconductor passive devices

A testchip for fully characterizing high-temperature-superconducting (HTS) thin-film properties relevant to planar passive microwave device applications is presented. The chip integrates coplanar resonators and transmission lines along with structures for process monitoring. Measurements of the quality factor of coplanar resonators as a function of temperature and input power are reported. For the coupling of the resonators to the input signals, microwave probes with 40-GHz bandwidth have been used within the cryo-environment. Quality values obtained at 5 GHz and 77 K are superior to that of an equivalent copper resonator by a factor of about 40.<>