The electronics of a control system for micromirrors in a laser-scanning device

The electronics and software developed for the control system of a micromirror-based laser-scanning endoscope are presented in conjunction with features of the micromirrors and their driving requirements. These micromirrors, which are crucial for the laser-scanning operation of the endoscope device, are embedded in the endoscope head and have been manufactured using silicon MEMS (Micro Electro-Mechanical Systems) technology. The micromirrors are electrostatically deflected and driven by appropriate high-voltage waveforms created in the control system. This computer-based system, using appropriate software, generates the control waveforms, which, after adequate amplification, drive the scanning micromirrors. The electronics developed are capable of generating control voltages with amplitudes up to 440 V pk-pk, within a bandwidth from DC to 20 kHz, and ensures an electrostatic driving of scanning micromirrors with a high positioning accuracy in the sub-pixel range.