Title :
The growth of zinc oxide nanocrystals on the zinc oxide thin film by chemical bath deposition
Author :
Byrczek, Michal ; Malewicz, Miroslaw ; Teterycz, Helena
Author_Institution :
Fac. of Microsyst. Electron. & Photonics, Wroclaw Univ. of Technol., Wroclaw, Poland
Abstract :
In the paper the low temperature deposition of zinc oxide called Chemical Bath Deposition (CBD) will be described. Zinc oxide nanocrystals grow on the thin layer of ZnO. In our investigation the thin film of ZnO was deposited using spin coating, on the glass substrate covered with thin film of Indium Tin Oxide (ITO). The goal of our research is to develop a cheap method of ZnO nanostructures growth, which will be applied in electrochemical gas sensors as a gas sensitive layer.
Keywords :
II-VI semiconductors; electrochemical sensors; gas sensors; indium compounds; nanostructured materials; semiconductor growth; semiconductor thin films; spin coating; tin compounds; wide band gap semiconductors; zinc compounds; InSnO-SiO2; SiO2; ZnO; chemical bath deposition; electrochemical gas sensors; gas sensitive layer; glass substrate; indium tin oxide; low-temperature deposition; nanostructure growth; spin coating; zinc oxide nanocrystals; zinc oxide thin film; Chemicals; Coatings; Glass; Indium tin oxide; Nanocrystals; Nanostructures; Sputtering; Substrates; Temperature; Zinc oxide;
Conference_Titel :
Students and Young Scientists Workshop "Photonics and Microsystems", 2009 International
Conference_Location :
Wernigerode
Print_ISBN :
978-1-4244-4304-8
DOI :
10.1109/STYSW.2009.5470315
