• DocumentCode
    243940
  • Title

    High Mobility n and p Channels on Gallium Arsenide and Silicon Substrates Using Interfacial Misfit Dislocation Arrays

  • Author

    Shima, Darryl ; Balakrishnan, Ganesh

  • Author_Institution
    Univ. of New Mexico, Albuquerque, NM, USA
  • fYear
    2014
  • fDate
    9-11 July 2014
  • Firstpage
    374
  • Lastpage
    379
  • Abstract
    We demonstrate the growth of III-Sb buffers on GaAs and Silicon substrates through the use of an epitaxial technique involving the formation of interfacial misfit dislocation arrays that is formed between the III-Sb alloy and the substrate. The interfacial misfit array results in the spontaneous relaxation of the highly mismatched III-Sb semiconductor and provides a platform for the realization of high mobility channels on GaAs and Silicon. We make use of InAs type -- II confinement structures for n-type and pseudomorphic InGaSb type -- I structures for p-type channels.
  • Keywords
    Hall mobility; III-V semiconductors; buffer layers; dislocation arrays; gallium compounds; indium compounds; molecular beam epitaxial growth; semiconductor epitaxial layers; semiconductor growth; GaAs; III-Sb buffer growth; III-Sb semiconductors; InAs; InAs type-II confinement structures; InGaSb; Si; epitaxial technique; gallium arsenide substrates; high mobility channels; interfacial misfit dislocation arrays; n-type channels; p-type channels; pseudomorphic InGaSb type-I structures; silicon substrates; Epitaxial growth; Gallium arsenide; Silicon; Strain; Substrates; Surface treatment; Antimonides; III-V; Molecular Beam Epitaxy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI (ISVLSI), 2014 IEEE Computer Society Annual Symposium on
  • Conference_Location
    Tampa, FL
  • Print_ISBN
    978-1-4799-3763-9
  • Type

    conf

  • DOI
    10.1109/ISVLSI.2014.99
  • Filename
    6903392