Title :
Improved quality factor of thin film inductor by application of multilayer film
Author :
Shirakawa, K. ; Kurata, H. ; Kasuya, M. ; Ohnuma, S. ; Toriu, J. ; Matsuki, H. ; Murakami, K.
Author_Institution :
Amorphous Magnetic Device Lab.
Keywords :
Frequency; Nonhomogeneous media; Q factor; Thin film inductors;
Conference_Titel :
Magnetics Conference, 1992. Digests of Intermag '92., International
Conference_Location :
St. Louis, MO, USA
Print_ISBN :
0-7803-0637-6
DOI :
10.1109/INTMAG.1992.696418
