Title :
Low Temperature Growth of Piezoelectric AlN Film for Surface and Bulk Wave Transducers by RF Reactive Planar Magnetron Sputtering
Author :
Shiosaki, T. ; Yamamoto, T. ; Oda, T. ; Harada, K. ; Kawabata, A.
Keywords :
Glass; Gold; Piezoelectric films; Piezoelectric materials; Piezoelectric transducers; Radio frequency; Sputtering; Substrates; Surface waves; Temperature;
Conference_Titel :
1980 Ultrasonics Symposium
DOI :
10.1109/ULTSYM.1980.197438
