DocumentCode :
2443153
Title :
A remotely interrogatable passive microactuator using SAW correlation
Author :
Tikka, Ajay C. ; Al-Sarawi, Said F. ; Abbott, Derek
Author_Institution :
Centre for High Performance Integrated Technol. & Syst., Univ. of Adelaide, Adelaide, SA
fYear :
2008
fDate :
Nov. 30 2008-Dec. 3 2008
Firstpage :
46
Lastpage :
51
Abstract :
In this paper, a novel remotely interrogatable ultrasonic microactuator is introduced utilising the complex signal processing functionality of an acoustic wave correlator. Fluid pumping can be achieved at ultrasonic frequencies by electrostatically actuating an edge clamped conducting diaphragm placed above the compressor IDT of the correlator. Secure interrogability of the wireless actuator is demonstrated by encoding the SAW correlator with a 5times2-bit Barker sequence and quantitatively deducing the code dependent diaphragm motion using finite element analysis. Moreover, the displacement optimization of the microactuator is addressed by the analyses of the device response for various acoustic mode excitations.
Keywords :
diaphragms; finite element analysis; microactuators; microfluidics; pumps; surface acoustic wave correlation; ultrasonic devices; SAW correlation; acoustic wave correlator; code dependent diaphragm motion; complex signal processing functionality; displacement optimization; edge clamped conducting diaphragm; finite element analysis; fluid pumping; remotely interrogatable passive microactuator; ultrasonic microactuator; wireless actuator; Acoustic signal processing; Acoustic waves; Actuators; Communication system security; Correlators; Encoding; Frequency; Microactuators; Pumps; Surface acoustic waves;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Sensing Technology, 2008. ICST 2008. 3rd International Conference on
Conference_Location :
Tainan
Print_ISBN :
978-1-4244-2176-3
Electronic_ISBN :
978-1-4244-2177-0
Type :
conf
DOI :
10.1109/ICSENST.2008.4757071
Filename :
4757071
Link To Document :
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