Research on temperature dependent characteristics and compensation methods for digital gyroscope

Author

Liu, Dachuan ; Chi, Xiaozhu ; Cui, Jian ; Lin, Longtao ; Zhao, Qiancheng ; Yang, Zhenchuan ; Yan, Guizhen

Author_Institution

Nat. Key Lab. of Micro/Nano Fabrication Technol., Peking Univ., Beijing

fYear

2008

fDate

Nov. 30 2008-Dec. 3 2008

Firstpage

273

Lastpage

277

Abstract

In recent years, MEMS gyroscope which is a kind of angular-rate-sensor has been improved greatly. In this paper, the effect of temperature changing on MEMS gyroscope is analysed. An evaluation and compensation platform based on the MCU and PC software has been fabricated. The temperature tests were done and some novel compensation algorithms were presented to fit the temperature curve. The thermal bias drift of the gyroscope compensated by the platform was reduced to 0.0667deg/s/degC compared with 0.618deg/s/degC before compensation.

Keywords

compensation; gyroscopes; micromechanical devices; MCU software; MEMS gyroscope; PC software; angular-rate-sensor; compensation platform; digital gyroscope; temperature changing; temperature tests; thermal bias drift; Circuits; Equations; Gyroscopes; Micromechanical devices; Notice of Violation; Signal processing algorithms; Silicon; Temperature dependence; Temperature sensors; Vibration measurement; MCU; MEMS gyroscope; compensation algorithm; temperature dependent characteristics;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensing Technology, 2008. ICST 2008. 3rd International Conference on

Conference_Location

Tainan

Print_ISBN

978-1-4244-2176-3

Electronic_ISBN

978-1-4244-2177-0

Type

conf

DOI

10.1109/ICSENST.2008.4757112

Filename

4757112