Title :
A vector network analyzer integrated into coplanar-waveguide probes
Author :
Bellantoni, J.V. ; Compton, R.C.
Author_Institution :
Sch. of Electr. Eng., Cornell Univ., Ithaca, NY, USA
Abstract :
A novel type of vector network analyzer integrated with two coplanar-waveguide (CPW) probe tips for making on-wafer measurements is presented. The CPW configuration is capable of large bandwidths and allows measurements to be made directly at the device under test. The analyzer consists of detector diodes spaced logarithmically along two CPW probe tips to sample the signal and uses six-port theory to calculate s-parameters. A 5-10-GHz proof-of-concept model was built and used to test a MMIC PIN diode switch.<>
Keywords :
MMIC; S-parameters; integrated circuit testing; microwave measurement; network analysers; probes; CPW probe tips; MMIC PIN diode switch; coplanar-waveguide probes; detector diodes; large bandwidths; on-wafer measurements; proof-of-concept model; s-parameters; six-port theory; vector network analyzer; Bandwidth; Coaxial components; Coplanar waveguides; Detectors; Frequency; Probes; Schottky diodes; Signal analysis; Switches; Testing;
Conference_Titel :
Microwave Symposium Digest, 1990., IEEE MTT-S International
Conference_Location :
Dallas, TX
DOI :
10.1109/MWSYM.1990.99754
