DocumentCode

2446271

Title

Effects Of Plasma And Bias Power On Magnetic Properties Of Sendust Films

Author

Araghi, M.S. ; Hurley, R.E. ; Gamble, Harold S. ; Dodd, P.M. ; Atkinson, Robert

Author_Institution

Northern Ireland Semiconductor Res. Ctr

fYear

1998

fDate

6-9 Jan. 1998

Firstpage

146

Lastpage

146

Keywords

Electrons; Iron; Magnetic films; Magnetic flux; Magnetic properties; Plasma properties; Saturation magnetization; Soft magnetic materials; Sputtering; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

MMM-Intermag Conference, 1998. Abstracts., The 7th Joint

Conference_Location

San Francisco, CA, USA

Print_ISBN

0-7803-5118-5

Type

conf

DOI

10.1109/INTMAG.1998.737306

Filename

737306