Petri net modeling and performance analysis of cluster tools with chamber revisiting

Author

Zuberek, W.M.

Author_Institution

Dept. of Comput. Sci., Memorial Univ. of Newfoundland, St. John´´s, Nfld., Canada

Volume

2

fYear

2001

fDate

15-18 Oct. 2001

Firstpage

105

Abstract

Timed Petri nets are convenient models of cluster tools as they represent the flow of wafers through the chambers of the tool as well as consecutive actions performed by the robotic transporter. Since the durations of all activities are also represented in such model, performance characteristics can be derived for steady-state as well as for transient behaviors. Steady-state performance of tools with chamber revisiting is investigated in this paper. A general description of cluster tools is proposed for systematic derivation of schedules, and a Petri net model is automatically derived from this description. The performance of the modeled system is derived by using place invariants, without exhaustive reachability analysis.

Keywords

Petri nets; cluster tools; materials handling; production control; simulation; chamber revisiting; cluster tools model; manufacturing system; performance characteristics; place invariants; robotic transporter; scheduling; steady-state behaviors; timed Petri nets; Computer science; Integrated manufacturing systems; Job shop scheduling; Performance analysis; Petri nets; Reachability analysis; Robot kinematics; Semiconductor device modeling; Steady-state; Throughput;

fLanguage

English

Publisher

ieee

Conference_Titel

Emerging Technologies and Factory Automation, 2001. Proceedings. 2001 8th IEEE International Conference on

Conference_Location

Antibes-Juan les Pins, France

Print_ISBN

0-7803-7241-7

Type

conf

DOI

10.1109/ETFA.2001.997676

Filename

997676