Technology of a nanowire bioFET device for biomolecules detection

Author

Moldovan, Clara ; Dinescu, Adrian ; Manea, E. ; Iosub, R. ; Brasoveanu, C. ; Firtat, B. ; Moldovan, Clara ; Ion, Mihaela ; Manolescu, Andrei

Author_Institution

Politeh. Univ. of Bucharest, Bucharest, Romania

Volume

2

fYear

2009

fDate

12-14 Oct. 2009

Firstpage

549

Lastpage

552

Abstract

The paper is presenting the technology of a nanowire FET device to be used in biodetection. The nanosensor we are presenting is containing a FET device realized on top of a silicon wafer substrate with a long nanowire allowing the conduction between source and drain and hosting the specific biomaterial on top of it. (nanowire bioFET) The FET device that is presented comprises two gates, one on the back, and one on top. The FET with double gate was realized in a unique technological process flow that will be described. The masks and the layout will be presented. The technology of the device will be presented and the development of the nanowire technology as well.

Keywords

biomolecular electronics; electrical conductivity; field effect transistors; nanosensors; nanowires; biodetection; biomolecules detection; conduction; double gate; nanosensor; nanowire bioFET device; nanowire technology; silicon wafer substrate; Biochemical analysis; Biosensors; Charge carriers; Electrodes; FETs; Molecular biophysics; Nanobioscience; Nanoscale devices; Paper technology; Semiconductivity;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference, 2009. CAS 2009. International

Conference_Location

Sinaia

ISSN

1545-827X

Print_ISBN

978-1-4244-4413-7

Type

conf

DOI

10.1109/SMICND.2009.5336651

Filename

5336651