DocumentCode :
2452146
Title :
QFT-based robust and precision motion control system for a high speed direct-drive XY table positioning mechanism
Author :
Liu, Zuo Z. ; Luo, Fang L. ; Rashid, Muhammad H.
Author_Institution :
Nanyang Technol. Univ., Singapore, Singapore
Volume :
1
fYear :
2003
fDate :
12-16 Oct. 2003
Firstpage :
293
Abstract :
In this paper, a new quantitative feedback theory (QFT) based robust and precision control system is proposed for a high speed direct-drive XY-table positioning mechanism in semiconductor wire-bonding applications. The most difficult control problems of the systems, caused by mechanical resonances, are solved by the use of a robust velocity feedback controller in the inner loop of the cascaded control structure. The resulting velocity controller and the outer loop position controller are used in combination with auto-tuning feedforward controller to assure consistent and high tracking performance of the motion system with good stability, robustness, disturbance rejection and sensor noise suppression. Validation and implementation of the motion profile with a maximum acceleration of 6.8 g (1g=9.81 m/s2) are carried out on tens of mass produced wire-bonding machines in order to confirm the effectiveness of the control strategy.
Keywords :
DC motor drives; cascade control; feedforward; integrated circuit manufacture; lead bonding; machine control; motion control; nonlinear control systems; position control; robust control; servomotors; DC motor drive; QFT-based robust control; XY table positioning mechanism; auto-tuning feedforward controller; cascaded control structure; disturbance rejection; field weakening; high speed direct-drive; high tracking performance; inner loop; integrated circuits interconnection; mass produced wire-bonding machines; mechanical resonances; nonlinear control; outer loop position controller; precision motion control; quantitative feedback theory; robust velocity feedback controller; robustness; semiconductor wire-bonding applications; sensor noise suppression; servo; stability; velocity controller; Adaptive control; Control systems; Feedback; Motion control; Noise robustness; Resonance; Robust control; Robust stability; Tracking loops; Velocity control;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Industry Applications Conference, 2003. 38th IAS Annual Meeting. Conference Record of the
Print_ISBN :
0-7803-7883-0
Type :
conf
DOI :
10.1109/IAS.2003.1257516
Filename :
1257516
Link To Document :
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