مرکز منطقه ای اطلاع رساني علوم و فناوري - SAW Resonators on Silicon with ZnO Limited to IDT Regions

DocumentCode :

2453831

Title :

SAW Resonators on Silicon with ZnO Limited to IDT Regions

Author :

Schwartz, S.S. ; Martin, S.J. ; Gunshor, R.L. ; Datta, S. ; Pierret, R.F.

fYear :

1983

fDate :

Oct. 31 1983-Nov. 2 1983

Firstpage :

280

Lastpage :

282

Keywords :

Couplings; Etching; Gratings; Reflection; Reflectivity; Silicon; Substrates; Surface acoustic waves; Transducers; Zinc oxide;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

1983 Ultrasonics Symposium

Conference_Location :

Atlanta, GA, USA

Type :

conf

DOI :

10.1109/ULTSYM.1983.198058

Filename :

1534998

Link To Document :