Title :
Memory Effect in Piezoelectric AlN Gates
Author :
Fathimulla, A. ; Lakhani, A.A.
fDate :
Oct. 31 1983-Nov. 2 1983
Keywords :
Aluminum nitride; Conductivity; Current measurement; Displacement measurement; Radio frequency; Semiconductor films; Sputtering; Stress; Voltage; Zinc oxide;
Conference_Titel :
1983 Ultrasonics Symposium
Conference_Location :
Atlanta, GA, USA
DOI :
10.1109/ULTSYM.1983.198237
