DocumentCode :
2459446
Title :
Thin- and Thick-Film Material Characterization Using Wideband Reflection Acoustic Microscopy
Author :
Lee, C.C. ; Chang, Xiaolin ; Tsai, C.S.
fYear :
1984
fDate :
14-16 Nov. 1984
Firstpage :
618
Lastpage :
621
Keywords :
Acoustic materials; Acoustic measurements; Acoustic reflection; Frequency measurement; Microscopy; Optical films; Optical reflection; Resonant frequency; Substrates; Wideband;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
IEEE 1984 Ultrasonics Symposium
Conference_Location :
Dallas, Texas, USA
Type :
conf
DOI :
10.1109/ULTSYM.1984.198373
Filename :
1535313
Link To Document :
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