Title :
Thin- and Thick-Film Material Characterization Using Wideband Reflection Acoustic Microscopy
Author :
Lee, C.C. ; Chang, Xiaolin ; Tsai, C.S.
Keywords :
Acoustic materials; Acoustic measurements; Acoustic reflection; Frequency measurement; Microscopy; Optical films; Optical reflection; Resonant frequency; Substrates; Wideband;
Conference_Titel :
IEEE 1984 Ultrasonics Symposium
Conference_Location :
Dallas, Texas, USA
DOI :
10.1109/ULTSYM.1984.198373