Title :
Nondestructive TAV Spectroscopy to Detect Impurity Levels in Semiconductor by Scanning the Energy Gap with Biasing Electric Field
Author :
Tabib-Azar, M. ; Das, P.
Keywords :
Conductivity; Electron traps; Interface states; Monitoring; Optical surface waves; Semiconductor device testing; Semiconductor impurities; Spectroscopy; Surface acoustic waves; Surface waves;
Conference_Titel :
IEEE 1985 Ultrasonics Symposium
Conference_Location :
San Francisco, CA, USA
DOI :
10.1109/ULTSYM.1985.198668