• DocumentCode
    2467696
  • Title

    Thin film characterization by acoustic emission monitoring of nanoindentation

  • Author

    Daugela, A. ; Wyrobek, J.T.

  • Author_Institution
    Hysitron Inc.
  • fYear
    2000
  • fDate
    9-13 April 2000
  • Firstpage
    581
  • Lastpage
    581
  • Keywords
    Acoustic emission; Acoustic propagation; Adaptive filters; Filtering; Monitoring; Signal processing; Substrates; Surface acoustic waves; Time frequency analysis; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Magnetics Conference, 2000. INTERMAG 2000 Digest of Technical Papers. 2000 IEEE International
  • Conference_Location
    Toronto, ON, Canada
  • Print_ISBN
    0-7803-5943-7
  • Type

    conf

  • DOI
    10.1109/INTMAG.2000.872356
  • Filename
    872356